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Advanced Engineering 2021

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Aerotech introduces linear piezo nanopositioners

Aerotech introduces linear piezo nanopositioners Aerotech's QNP-L series linear piezo nanopositioning stages give nanometer-level performance in a compact, high-stiffness package. A variety of travel and feedback options make these stages ideal for applications ranging from microscopy to optics alignment.

The QNP-L linear piezo stages are guided by precision flexures optimized using finite element analysis to ensure high-stiffness and long life. This design offers best-in-class stiffness and resonant frequency for high process throughput and fast closed-loop response. The design also provides unparalleled geometric performance (straightness and angular errors) while minimizing overall stage package size.

All QNP-L piezo stages offer closed-loop feedback using a unique capacitive sensor design that yields sub-nanometer positioning resolution and high-positioning accuracy (linearity). The capacitive sensors directly measure the output of the positioning carriage, enabling superior linearity and positioning repeatability when compared to indirect feedback metrology techniques such as strain-gage feedback.
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