Online trace moisture event sensor launched
The PURA Plus from Michell Instruments is an on-line trace moisture event sensor designed for UHP inert gas applications in semiconductor fabs to allow installation at multiple locations at the final point of entry to the process tool. Installed in the gas distribution system, the PURA Plus provides rapid indication (less than 1 minute) of a moisture event as low as 20ppb at 1ppb baseline.
To achieve this high speed of response while maintaining the extreme sensitivity Michell has invented a unique detection algorithm and combined it with a newly developed UHP-suitable ceramic sensor design. Besides other benefits it allows the PURA Plus to meet the particulate shedding performance required by the semiconductor industry.
The PURA Plus meets the highest quality standards for material and surface finish. It is assembled and packed in a class 100 clean room environment. The PURA Plus is designed to operate reliably and without any maintenance for a minimum of two years. Information is output via Modbus, with warning and alarm status being indicated with a 'traffic light' status indicator LEDs. Further development will add a 4-20 mA output to the instrument.
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