Passive and driven options for air bearing linear guides

Air bearing slides float on a thin film of pressurised air, eliminating mechanical contact between moving and stationary components. This design delivers virtually zero friction, zero wear, and exceptional motion uniformity, making them ideal for applications including: precision metrology and surface profiling; semiconductor wafer inspection and processing; optical and mechanical alignment, precision assembly; utra-high-resolution scanning systems; and research and laboratory instrumentation

Key features and benefits include: 50 to 1000mm motion range; 9 platform sizes: 50x50 to 300x300mm; up to 760kg load; sub-micrometre-level straightness and flatness; no lubrication required, eliminating particulate generation; zero backlash and zero stick-slip for smooth, uniform motion; and long-term performance with no mechanical wear. The products are configurable for integration with integrated motors, linear encoders, or external drive systems.

These U.S.-manufactured passive air bearing slides can be paired with manual adjustment mechanisms or integrated into larger automated positioning systems using linear motors or other actuation technologies. Available in multiple sizes and load capacities, PI's slides are cleanroom-compatible and can be customised for specialised environments, including vacuum applications.