Posted to News on 19th Jul 2019, 00:00
Air Bearing Systems for High-Precision Laser Processing
The video shows a motion solution for high-precision laser processing such as wafer dicing. The multi-axis setup is based on PIs high-performance air bearing stages to meet the increasing requirements of the industry.
The motion system offers high guiding accuracy, exceptional velocity control, and high repeatability. NanoPWM drive technology from ACS enables nanometer tracking error and optimal velocity control. The ACS Laser Control Module (LCM) provides laser control with full synchronization to motion.
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