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Direct-drive Z-axis nanopositioning stages

Direct-drive Z-axis nanopositioning stages According to Aerotech, only non-contact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT-L-Z stages use advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance for high-precision positioning, disk-drive fabrication, fibre alignment, optical delay element actuation, sensor testing and scanning processes that demand smooth and precise motion.

ANT-L-Z stages use a nearly frictionless counterbalance mechanism to maintain performance levels while minimising motor heating. The counterbalance is user-adjustable from 0-10kg, depending on stage model. Two models are available - the ANT95-L-Z and ANT130-L-Z - with two accuracy grades. The ANT-L-Z family has universal mounting and tabletop patterns that allow for easy system integration. The entire ANT nanopositioner family of linear, rotary, lift, Z-axis and goniometers can be combined for flexible system designs and multi-axis configurations.

Outstanding accuracy, position repeatability and in-position stability require high system resolution. The ANT-L-Z stage's industry-leading 2nm minimum incremental step size provides this high level of performance.

The excellent in-position stability of less than 2nm is assisted by high-quality, anti-creep, crossed-roller bearings. These stages offer virtually maintenance-free operation over the life of the product. Aerotech's direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.
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