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Webinar: Liquid handling Event by Festo UK & Ireland

On-line webinar

01/12/2020(10:00-11:00)

How pressure-over-liquid provides precise, accurate and cost-effective throughput Precise and accurate (more)

Southern Manufacturing

Farnborough, Hants(GU14 6TQ)

20/04/2021 - 22/04/2021

Southern Manufacturing and Electronics is the most comprehensive annual industrial exhibition in the (more)

PPMA Show 2021

NEC, Birmingham(B40 1NT)

28/09/2021 - 30/09/2021

PPMA Show 2021 will be the UK’s largest ever event dedicated to state-of-the-art processing and (more)

Advanced Engineering 2021

NEC Birmingham(B40 1NT)

03/11/2021 - 04/11/2021

Join us in our 12th and most important edition to date, as we invite engineers and management from all (more)

Pfeiffer Vacuum presents new turbopump for ion implantation applications HiPace 2800 IT

Pfeiffer Vacuum presents new turbopump for ion implantation applications HiPace 2800 IT

With the HiPace 2800 IT Pfeiffer Vacuum presents a turbopump especially dedicated for ion implantation applications. The sophisticated rotor design of the turbopump results in an optimized pumping speed for light gases. This ensures very good process adaption for ion implantation processes, were hydrogen is the most accumulating gas. With 2,600 l/s pumping speed for hydrogen the new HiPace 2800 IT is the best turbopump in its class.

The intelligent temperature management system prevents process condensation and deposition inside the pumping system. It allows setting the temperature individually to ideally support the process. The special coating of the rotor ensures robustness against all ion implantation process materials. Being based on a so-called hybrid bearing, a combination of ceramic ball bearings on the fore-vacuum side and permanently magnetic radial bearings on the high vacuum side, these HiPace turbopumps have a particularly robust bearing design. Together with the efficient coating, this forms the basis for the long life cycle and maximum up-time of the pumps.

 
Pfeiffer Vacuum

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