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XY linear motor stage that offers unparalleled geometric performance

XY linear motor stage that offers unparalleled geometric performance Available in nine different travel and performance configurations, the PlanarDL stage from Aerotech is an ideal solution for applications ranging from high-accuracy surface profilometry to high-speed semiconductor and LED wafer scribing. The stages offer an optimised structure, components with exacting precision, Aerotech's own direct-drive motor technology and an integrated cable management system.

The PlanarDL XY design allows for unparalleled planar geometric performance in applications where straightness and flatness of motion are critical. High-precision, anti-creep crossed-roller bearings, precision-machined surfaces and Aerotech linear motors driving through the axes' centre-of-stiffness result in exceptional geometric tolerances, including straightness to ±0.4µm and flatness to ±1µm.

PlanarDL structural elements are optimised for high dynamics and high stiffness for the most demanding dynamic applications. Capable of achieving 1m/s velocities and 1.5g accelerations, the PlanarDL enables high-throughput, high-accuracy processing resulting in superior process yield and a low total cost of ownership. Unlike products using recirculating bearings, the anti-creep crossed-roller bearings used in this design provide the smooth motion ideal for the most challenging scanning applications.

Non-contact, direct-drive technology offers high-speed and accurate positioning coupled with maintenance-free operation and long service life. At the heart of the PlanarDL is Aerotech's proprietary direct-drive technology. Aerotech says this drive technology allows for unmatched performance compared to other screw-based and linear-motor designs.

The PlanarDL-200XY and -300XY stages are both available with one or two motors per axis, allowing optimisation of each individual axis for the specific application and process parameters. Regardless of the number of motors selected, the resulting drive force acts through the centres of friction and stiffness resulting in superior geometric performance and accuracy.

The cable management system on the PlanarDL is integrated into the stage and optimised for long life and performance. Additional standard options are available for extra servo axes or air/vacuum lines for vacuum chucks or other process pneumatics.

The PlanarDL is available in three positioning performance options: -BASE, -PLUS and -ULTRA. Relying upon decades of experience in system-level design including not only positioning mechanics, but also software and electronics, Aerotech has developed advanced technologies to push the envelope of precision. High-performance -PLUS and -ULTRA options are available to enable accuracies and straightness values down to ±400nm and orthogonality down to 1 arc second.
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