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XY-rotary system for high precision clean room applications

XY-rotary system for high precision clean room applications

The demand for a high accuracy stages can now be met with Intellidrives’ integrated XY-rotary system that addresses the needs of scanning microscopy, wafer and printed circuit board inspection, semiconductor manufacturing and many others where precision is important.

Very precise fine positioning and control is easily achieved with servo controllers compatible with EtherCAT, CANOpen, RS-232, USB, Ethernet/IP interfaces.

These stages fitted with direct drive linear and rotary axes for smooth scanning applications as well for fast index motions with fast settling time. High-resolution linear and rotary ring absolute encoders offer exceptional repeatability and stability over a range of operating conditions.


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